Characterization of horseshoe-shaped defects in 4H-SiC thick homoepitaxial layers
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
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1. Characterization and formation mechanism of short step-bunching defects on 4H-SiC thick homoepitaxial films;Journal of Crystal Growth;2024-05
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