Role of charge particles irradiation on the deposition of AlN films using plasma focus device
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference47 articles.
1. Piezoelectric actuation of microbridges using AlN
2. Fabrication of AlN/Si SAW delay lines with very low RF signal noise
3. Growth of epitaxial AlN films on (Mn,Zn)Fe2O4 substrates by pulsed laser deposition
4. Delta-doped AlGaN∕AlN∕GaN microwave HFETs grown by metalorganic chemical vapour deposition
5. Thick, crack-free blue light-emitting diodes on Si(111) using low-temperature AlN interlayers andin situSixNy masking
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