Fabrication of highly aligned nano-hole/trench structures by atomic force microscopy tip-induced oxidation and atomic hydrogen cleaning
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference22 articles.
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2. Low-Temperature Cleaning of GaAs Substrate by Atomic Hydrogen Irradiation
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5. G. Baldassarri H. v. H., M. Bissiri, A. Polimeni, M. Capizzi, M. Fischer, M. Reinhardt, A. Forchel, Appl. Phys. Lett. 78 (2001) 3472.
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