Fabrication of AlN templates on SiC substrates by sputtering-deposition and high-temperature annealing-Reference-Cited by-同舟云学术

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Fabrication of AlN templates on SiC substrates by sputtering-deposition and high-temperature annealing

Published:2019-03 Issue: Volume:510 Page:13-17
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Uesugi Kenjiro,Hayashi Yusuke^ORCID,Shojiki Kanako,Xiao Shiyu,Nagamatsu Kentaro,Yoshida Harumasa,Miyake Hideto

Funder

Ministry of Education, Culture, Sports, Science and Technology

Japan Society for the Promotion of Science

Japan Science and Technology Agency

Erzincan Üniversitesi

Core Research for Evolutional Science and Technology

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference25 articles.

1. Deep-ultraviolet light-emitting diodes with external quantum efficiency higher than 20% at 275 nm achieved by improving light-extraction efficiency;Takano;Appl. Phys. Express,2017

2. 150 mW deep-ultraviolet light-emitting diodes with large-area AlN nanophotonic light-extraction structure emitting at 265 nm;Inoue;Appl. Phys. Lett.,2017

3. AlGaN-based deep UV LEDs grown on sputtered and high temperature annealed AlN/sapphire;Susilo;Appl. Phys. Lett.,2018

4. Preparation of a freestanding AlN substrate from a thick AlN layer grown by hydride vapor phase epitaxy on a bulk AlN substrate prepared by physical vapor transport;Kumagai;Appl. Phys. Express,2012

5. Nucleation and growth kinetics of AlN films on atomically smooth 6H–SiC (0001) surfaces;Yamada;Appl. Phys. Lett.,2001

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1. MoS2-assisted growth of highly-oriented AlN thin films by low-temperature van der Waals epitaxy;Journal of Vacuum Science & Technology A;2024-07-10

2. Review—Gate Oxide Thin Films Based on Silicon Carbide;ECS Journal of Solid State Science and Technology;2022-08-01

3. Growth of self-assembled nanovoids embedded AlN layer on a low- temperature buffer by metal organic chemical vapor deposition;Thin Solid Films;2022-06

4. Four-inch high quality crack-free AlN layer grown on a high-temperature annealed AlN template by MOCVD;Journal of Semiconductors;2021-12-01

5. Germicidal ultraviolet LEDs: a review of applications and semiconductor technologies;Semiconductor Science and Technology;2021-10-25

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