Large thickness-dependent improvement of crystallographic texture of CVD silicon films on R-sapphire
Author:
Funder
SuperOx Ltd
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
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1. Investigation of the Initial Silicon-on-Sapphire Layer Formed by CVD Techniques;Semiconductors;2019-12
2. Study of the Structural Properties of Silicon-on-Sapphire Layers in Hydride-Chloride Vapor-Phase Epitaxy;Semiconductors;2017-12
3. Full CVD Reel-To-Reel Process to Obtain Perfectly Oriented Silicon Films on Metal Tapes with Oxide Buffer Layers**;Chemical Vapor Deposition;2014-07-25
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