Full CVD Reel-To-Reel Process to Obtain Perfectly Oriented Silicon Films on Metal Tapes with Oxide Buffer Layers**-Reference-Cited by-同舟云学术

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Full CVD Reel-To-Reel Process to Obtain Perfectly Oriented Silicon Films on Metal Tapes with Oxide Buffer Layers**

Published:2014-07-25 Issue:10-11-12 Volume:20 Page:356-363
ISSN:0948-1907
Container-title:Chemical Vapor Deposition
language:en
Short-container-title:Chem. Vap. Deposition

Author:

Moyzykh Mikhail¹²,Samoilenkov Sergey¹,Amelichev Vadim¹,Vasiliev Alexander³,Pozdnyakov Mikhail³,Mankevich Alexey¹,Tschepikov Vsevolod⁴,Kaul Andrey¹²

Affiliation:

1. SuperOx Company; Nauchny Proezd 20 117246 Moscow (Russia)

2. Moscow State University; Chemistry Department; 119992 Moscow (Russia)

3. Kurchatov Institute of Atomic Energy; Moscow (Russia)

4. Moscow State University; Department of Materials Science; 119992 Moscow (Russia)

Publisher

Wiley

Subject

Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/cvde.201407107/fullpdf

Reference17 articles.

1. Small angle grain boundary Ge films on biaxial CaF2/glass substrate

2. Germanium films with strong in-plane and out-of-plane texture on flexible, randomly textured metal substrates

3. Biaxial CdTe/CaF2 films growth on amorphous surface

4. Well-Oriented Silicon Thin Films with High Carrier Mobility on Polycrystalline Substrates

5. Second-Generation HTS Conductors

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1. Si Electrochemical Liquid Phase Epitaxy: Low-Temperature Growth of Hyperdoped Epitaxial Si Films;Chemistry of Materials;2022-12-08

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