Three-dimensional CZ silicon melt flow under induction heating
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference19 articles.
1. A finite element model for induction heating of a metal crucible
2. Flow instability of the melt during Czochralski Si crystal growth: dependence on growth conditions; a numerical simulation study
3. Structure of temperature and velocity fields in the Si melt of a Czochralksi crystal growth system
4. Thermal waves of a nonaxisymmetric flow in a Czochralski-type silicon melt
5. Spoke patterns on molten silicon in Czochralski system
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Global simulation of an RF Czochralski furnace during different stages of germanium single crystal growth, part II: to investigate the effect of the crucible's relative position against the RF coil on the isotherms, flow fields and thermo-elastic stresses;CrystEngComm;2017
2. Numerical Simulation of the Effects of Different Coatings on Graphite Susceptor for the Induction Process of Polycrystalline Silicon;Materials Science Forum;2011-12
3. Modelling the Effects of Material Property and Dimension on the Heating of Silicon with Induction Directional Casting Furnace;Key Engineering Materials;2011-04
4. Induction melting process using segmented graphite crucible for silicon melting;Solar Energy Materials and Solar Cells;2011-01
5. Numerical study of induction heating in melt growth systems—Frequency selection;Journal of Crystal Growth;2010-10
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