Kinetic Monte Carlo simulations for AlN and AlGaN epitaxial growth on AlN
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference11 articles.
1. Al coverage of AlN(0001) surface and Al vapor pressure – Thermodynamic assessment based on ab initio calculations;Strak;Comput. Mater. Sci.,2022
2. Atomic structure and stability of AlN(0001) and (0001̲) surfaces;Northrup;Phys. Rev. B,1997
3. Structural and electronic properties of AlN(0001) surface under partial N coverage as determined by ab initio approach;Strak;J. Appl. Phys.,2015
4. Ab initio study for adsorption and desorption behavior at step edges of AlN(0001) and GaN(0001) surfaces;Akiyama;Japan. J. Appl. Phys.,2020
5. Step pinning and hillock formation in (Al, Ga)N films on native AlN substrates;Schulz;J. Appl. Phys.,2022
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