First principles calculation of strain effects on the density of interface states in 4H-SiC

Author:

Wan Caiping,Li Bo,Zhu Huiping,Xu Hengyu,Ye Tianchun

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference15 articles.

1. T. Hosoi et al., “Ultrahigh-temperature rapid thermal oxidation of 4H-SiC(0001) surfaces and oxidation temperature dependence of SiO2/SiC interface properties,” Applied Physics Letters, vol. 109, no. 18, 2016, doi: 10.1063/1.4967002.

2. Tsunenobu, and Kimoto, “Generation of very fast states by nitridation of the SiO2/SiC interface,”;Hironori;Journal of Applied Physics,2012

3. Material science and device physics in SiC technology for high-voltage power devices;Kimoto and Tsunenobu;Japanese Journal of Applied Physics,2015

4. K. Shiraishi, K. Chokawa, H. Shirakawa, K. Endo, and H. Watanabe, “First principles study of SiC/SiO2 interfaces towards future power devices,” in 2014 IEEE International Electron Devices Meeting, 2015, vol. 514, pp. 21.3.1-21.3.4.

5. X. Li, A. Ermakov, V. Amarasinghe, E. Garfunkel, T. Gustafsson, and L. C. Feldman, “Oxidation induced stress in SiO2/SiC structures,” Applied Physics Letters, vol. 110, no. 14, 2017, doi: 10.1063/1.4979544.

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