Numerical analyses and experimental validations on transport and control of carbon in Czochralski silicon crystal growth
Author:
Funder
NEDO
METI
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference14 articles.
1. Crystal Growth and Evaluation of Silicon for VLSI and ULSI;Eranna,2014
2. Carbon in silicon: properties and impact on devices;Kolbesen;Solid-State Electron.,1982
3. Crystal growth of MCZ silicon with ultralow carbon concentration;Nagai;J. Cryst. Growth,2014
4. Thermally induced microdefects in Czochralski-grown silicon: nucleation and growth behavior;Kishino;Jpn. J. Appl. Phys.,1982
5. Control of carbon in Czochralski silicon crystals;Series;J. Cryst. Growth,1983
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