Epitaxial growth of LaAlO3 on SrTiO3-buffered Si (001) substrates by atomic layer deposition

Author:

Ngo Thong Q.,Posadas Agham,McDaniel Martin D.,Ferrer Domingo A.,Bruley John,Breslin Chris,Demkov Alexander A.,Ekerdt John G.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

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4. Oxides, oxides, and more oxides: high-κ oxides, ferroelectrics, ferromagnetics, and multiferroics;Izyumskaya;Critical Reviews in Solid State and Materials Sciences,2009

5. Si-compatible candidates for high-κ dielectrics with the Pbnm perovskite structure;Coh;Physical Review B,2010

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