Author:
Lee In-Ji,Paik Ungyu,Park Jea-Gun
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference45 articles.
1. Dependence of crystal nature on the gettering efficiency of iron and nickel in a Czochralski silicon wafer;Park;Microelectronic Engineering,2003
2. Point defect dynamics in silicon and the connection between microdefect formation and operating conditions in the bulk growth of silicon;Sinno,1994
3. Distribution of grown-in crystal defects formed by point defect diffusion;Habu,1994
4. The engineering of intrinsic point defects in silicon wafers and crystals;Falster;Materials Science and Engineering B,2000
5. Vacancy and self-interstitial concentration incorporated into growing silicon crystals;Voronkov;Journal of Applied Physics,1999
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2 articles.
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