Atomic layer deposition of TaN and Ta3N5 using pentakis(dimethylamino)tantalum and either ammonia or monomethylhydrazine
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference53 articles.
1. Structure of tantalum nitrides;Terao;Jpn. J. Appl. Phys.,1970
2. Structural and electrical properties of Ta and Ta nitrides deposited by chemical vapour deposition;Hieber;Thin Solid Films,1974
3. Metallic to insulating nature of TaNx: role of Ta and N vacancies;Stampfl;Phys. Rev. B,2003
4. TiN and TaN as diffusion barriers in metallizations to silicon semiconductor devices;Wittmer;Appl. Phys. Lett.,1980
5. Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition;Kim;J. Appl. Phys.,2005
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