Structural characterization of cubic and hexagonal GaN thin films grown by IBA–MBE on SiC/Si
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference49 articles.
1. Substrates for gallium nitride epitaxy
2. MOVPE growth of GaN on Si(111) substrates
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4. Control and improvement of crystalline cracking from GaN thin films grown on Si by metalorganic chemical vapor deposition
5. GaN-Based Devices on Si
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1. GaN growth on (0 0 1) and (1 1 0) MgO under different Ga/N ratios by MBE;Journal of Crystal Growth;2022-07
2. Evidence of C migration in the SiO2 to the SiO2/Si interface of C-implanted structures;Thin Solid Films;2021-07
3. X-ray diffraction and secondary ion mass spectrometry investigations of GaN films grown on (0 0 1) and (1 1 0) MgF2 substrates by plasma-assisted molecular beam epitaxy (PA-MBE);Materials Science in Semiconductor Processing;2020-11
4. Alloy segregation at stacking faults in zincblende GaN heterostructures;Journal of Applied Physics;2020-10-14
5. Ion beam synthesis of SiC on Si toward the radiation damage free limit;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-04
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