Low-temperature deposition of crystalline silicon nitride nanoparticles by hot-wire chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference36 articles.
1. Nitrogen dilution effects on structural and electrical properties of hot-wire-deposited a-SiN:H films for deep-sub-micron CMOS technologies
2. The growth of silicon nitride crystalline films using microwave plasma enhanced chemical vapor deposition
3. Crystallization of silicon nitride thin films synthesized by plasma-enhanced chemical vapour deposition
4. Summary of research in NEDO Cat-CVD project in Japan
5. Growth process and properties of silicon nitride deposited by hot-wire chemical vapor deposition
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