Effects of argon pressure and r.f. power on magnetron sputtered aluminum doped ZnO thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference51 articles.
1. TCO and light trapping in silicon thin film solar cells;Müller;Sol. Energy,2004
2. Comparison of the ZnO:Al films deposited in static and dynamic modes by reactive mid-frequency magnetron sputtering;Hong;J. Cryst. Growth,2003
3. Transparent conducting oxide semiconductors for transparent electrodes;Minami;Semicond. Sci. Technol.,2005
4. Transparent and conductive Ga-doped ZnO films grown by RF magnetron sputtering on polycarbonate substrates;Gong;Sol. Energy Mater. Sol. Cells,2010
5. Characteristics of indium tin oxide films deposited by r.f. magnetron sputtering;Joshi;Thin Solid Films,1995
Cited by 42 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Optimization of high-quality gallium nitride thin films deposited on silicon substrates with an aluminum nitride buffer layer through radio-frequency magnetron sputtering;Vacuum;2024-09
2. Influence of power ramps on the physical properties of AZO thin films deposited at room temperature by RF magnetron sputtering technique;Semiconductor Science and Technology;2024-08-14
3. Temperature shock to manipulate the optical properties of Al-doped ZnO films;Vacuum;2024-04
4. The investigation of structural, surface topography, and optical behaviors of Al-doped ZnO thin films with annealing temperature deposited by RF magnetron sputtering;Journal of Materials Science: Materials in Electronics;2023-03
5. Sputtering Deposition With Low Cost Multi-Element Powder Targets;IEEE Open Journal of Nanotechnology;2023
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3