Features of oxide layer formation in high-aspect slot structures by means of MOCVD

Author:

Shevtsov Yuri V.,Kuchumov Boris М.,Kruchinin Vladimir N.,Spesivtsev Evgeni V.,Golovnev Igor F.,Igumenov Igor К.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

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4. D.R. Beaulieu, D. Gorelikov, H. Klotzsch, P. de Rouffignac, K. Saadatmand, K. Stenton, N. Sullivan, A.S. Tremsin, Novel fast neutron counting technology for efficient detection of special nuclear materials, in: Proceedings of the IEEE HST׳09, Conference . 2009, pp. 295–301.

5. Multiscale simulation and optimization of an atomic layer deposition process in a nanoporous material;Dwivedi;ECS Trans,2009

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