Controlled sputtering of AlN (002) and (101) crystal orientations on epitaxial 3C-SiC-on-Si (100) substrate-Reference-Cited by-同舟云学术

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Controlled sputtering of AlN (002) and (101) crystal orientations on epitaxial 3C-SiC-on-Si (100) substrate

Published:2016-04 Issue: Volume:440 Page:76-80
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Iqbal A.,Walker G.,Iacopi A.,Mohd-Yasin F.

Funder

Queensland Micro- and Nanotechnology Centre (QMNC)

Griffith School of Engineering

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference37 articles.

1. Thin Film Piezoelectrics for MEMS

2. High-Temperature Piezoelectric Sensing

3. Vibration energy harvesting with aluminum nitride-based piezoelectric devices

4. Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications

5. Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of growth parameters and systematical analysis on 8-inch piezoelectric AlN thin films by magnetron sputtering;Materials Science in Semiconductor Processing;2024-01

2. Micro-Scale Piezoelectric Energy Harvester Employing 3C-SiC and Si Diaphragms;2023 IEEE 21st Student Conference on Research and Development (SCOReD);2023-12-13

3. Formation mechanism of (10−13) AlN twins on m-plane sapphire substrates at high temperature by hydride vapor phase epitaxy;CrystEngComm;2023

4. Effect of silicon-based substrates and deposition type on sputtered AlN thin films: Physical & chemical properties and suitability for piezoelectric device integration;Applied Surface Science;2022-10

5. Machine Learning Assisted Classification of Aluminum Nitride Thin Film Stress via In-Situ Optical Emission Spectroscopy Data;Materials;2021-08-08

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