Lateral incorporation of vacancies in Czochralski silicon crystals
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference44 articles.
1. Etch Pits Observed in Dislocation-Free Silicon Crystals
2. VACANCY CLUSTERS IN DISLOCATION‐FREE SILICON
3. The Elimination of Vacancy-Cluster Formation in Dislocation-Free Silicon Crystals
4. Effect of growth parameters on formation and elimination of vacancy clusters in dislocation-free silicon crystals
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