Alternating magnetic field-assisted crystallization of Si films without metal catalyst-Reference-Cited by-同舟云学术

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Alternating magnetic field-assisted crystallization of Si films without metal catalyst

Published:2008-12 Issue:24 Volume:310 Page:5317-5320
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Seo Hyun-Sik,Kim Chang-Dong,Kang InByeong,Chung In-Jae,Jeong Min-Chang,Myoung Jae-Min,Shin Dong-Hoon

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference19 articles.

1. Low temperature poly-Si TFT-LCD by excimer laser anneal

2. T. Sameshima, IMID Proceedings, 2004, p. 129.

3. Effects of hydrogen on poly- and nano-crystallization of a-Si:H prepared by RF magnetron sputtering

4. Thin-Film Transistors with Polycrystalline Silicon Films Prepared by Two-Step Rapid Thermal Annealing

5. XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's

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2. Study of the Characteristics of Solid Phase Crystallized Bridged-Grain Poly-Si TFTs;IEEE Transactions on Electron Devices;2014-05

3. Dry Etching Characteristics of Amorphous Indium-Gallium-Zinc-Oxide Thin Films;Plasma Science and Technology;2012-10

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