Characterization of SiN and other transient species in a silicon tetrachloride–nitrogen discharge
Author:
Publisher
Elsevier BV
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Reference14 articles.
1. Glow-discharge synthesis of silicon nitride precursor powders
2. Measurement of the SiH3Radical Density in Silane Plasma using Infrared Diode Laser Absorption Spectroscopy
3. Direct kinetic studies of SiH3+SiH3, H, CCl4, SiD4, Si2H6, and C3H6by tunable infrared diode laser spectroscopy
4. The A(2Πi)–X(2Σ+) transition of the SiN radical by infrared diode laser spectroscopy
5. Laser detection of diatomic products of plasma sputtering and etching
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A study on spectroscopic parameters of X2+, A2 and B2+ low-lying electronic states of SiN radical;Acta Physica Sinica;2013
2. Direct Solid-State Electrochemical Synthesis of Silicon Tetrachloride from Silica at Ambient Temperatures and Pressures;ECS Transactions;2010-10-08
3. The CN and CS transient species in CH3SCN discharges;Chemical Physics;2004-07
4. Energy distributions of CO produced in an acetone-containing discharge;Chemical Physics Letters;2004-06
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