3D micro-structures for rarefied gas flow applications manufactured via two-photon-polymerization-Reference-Cited by-同舟云学术

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3D micro-structures for rarefied gas flow applications manufactured via two-photon-polymerization

Published:2023-05 Issue: Volume:211 Page:111915
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Zhang Dingdong,López-Quesada Guillermo,Bergdolt Samuel,Hengsbach Stefan^ORCID,Bade Klaus^ORCID,Colin Stéphane^ORCID,Rojas-Cárdenas Marcos^ORCID

Funder

Karlsruhe Institute of Technology

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference26 articles.

1. Design and applications of MEMS flow sensors: a review;Ejeian;Sens. Actuators Phys.,2019

2. An industrial and applied review of new MEMS devices features;Tanaka;Microelectron. Eng.,2007

3. Demonstration of a gas separator composed of Knudsen pumps;Nakaye;Vacuum,2016

4. Micromachined flow sensors—a review;Nguyen;Flow Meas. Instrum.,1997

5. A fully electronic microfabricated gas chromatograph with complementary capacitive detectors for indoor pollutants;Qin;Microsyst. Nanoeng.,2016

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent advances of stereolithographic 3D printing enabled by photon upconversion technology;Current Opinion in Green and Sustainable Chemistry;2023-10

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