Inelastic processes under gas cluster ion bombardment of metals
Author:
Funder
Moscow State University of Geodesy and Cartography
Midlands State University
Russian Science Foundation
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference42 articles.
1. Gas-dynamic sources of cluster ions for basic and applied research;Ieshkin;Phys. Usp.,2022
2. Materials processing by gas cluster ion beams;Yamada;Mater. Sci. Eng. R.,2001
3. Ion yield enhancement at the organic/inorganic interface in SIMS analysis using Ar-GCIB;Cristaudo;Appl. Surf. Sci.,2021
4. Sensitivity enhancement using chemically reactive gas cluster ion beams in secondary ion mass spectrometry (SIMS);Lagator;Surf. Interface Anal.,2022
5. Depth profiling of AlN and AlxGa1−xN crystals by XPS using Al Kα and Ag Lα line excitation and Ar ion gas cluster ion source;Romanyuk;J. Appl. Phys.,2023
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