Chemical constitution of coatings deposited remotely by activation of hexamethyldisiloxane in positive column plasma of glow discharge in argon flow
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference56 articles.
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2. Where physics meets chemistry: thin film deposition from reactive plasmas;Michelmore;Front. Chem. Sci. Eng.,2016
3. Mechanisms of plasma polymerization – reviewed from a chemical point of view;Friedrich;Plasma Process. Polym.,2011
4. Organosilicon films deposited in low-pressure plasma from hexamethyldisiloxane — a review;de Freitas;Vacuum,2021
5. Plasma polymerized thiophene: molecular structure and electrical properties;S Silverstein;Polymer,2002
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