Effects of seed layer thickness and post-annealing process on crystalline quality of β-Ga2O3 films prepared on Si (100) substrate by RF magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference44 articles.
1. A review of Ga2O3 materials, processing, and devices;Pearton;Appl. Phys. Rev.,2018
2. Gallium oxide solar-blind ultraviolet photodetectors: a review;Xu;J. Mater. Chem. C,2019
3. Review of Ga2O3-based optoelectronic devices;Guo;Materials Today Physics,2019
4. Innovative Infrared-pulsed laser assisted RF sputtered β-Ga2O3 thin film at low temperature process;Oh;J. Alloys Compd.,2021
5. Bio-realistic synaptic characteristics in the cone-shaped ZnO memristive device;Sokolov;NPG Asia Mater.,2019
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A review on synthesis and applications of gallium oxide materials;Advances in Colloid and Interface Science;2024-06
2. Preparation of ZnGa2O4-based deep ultraviolet photodetector with high photodetectivity by magnetron sputtering;Vacuum;2024-06
3. Effect of Ga2O3 seed layer on microstructure and properties of Ga2O3:Ta nanocrystalline film;Materials Science in Semiconductor Processing;2023-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3