Effect of various pulse plasma techniques on TiO2 etching for metalens formation
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference40 articles.
1. Three-dimensional optical metamaterial with a negative refractive index;Valentine;Nature,2008
2. Flat dielectric grating reflectors with focusing abilities;Fattal;Nat. Photonics,2010
3. Metamaterial inspired fabric antenna for wearable applications;Ashyap;Int. J. RF Microw. Computer-Aided Eng.,2019
4. Designing large, high-efficiency, high-numerical-aperture, transmissive meta-lenses for visible light;Byrnes;Opt Express,2016
5. Virtual-moving metalens array enabling light-field imaging with enhanced resolution;Park;Adv. Opt. Mater.,2020
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