Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference18 articles.
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2. Films and nanorods of transparent conducting oxide ITO by a citric acid sol route
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5. Design of magnetrons for dc sputtering
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