Design of magnetrons for dc sputtering-Reference-Cited by-同舟云学术

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Design of magnetrons for dc sputtering

Published:1989-01 Issue:7-8 Volume:39 Page:717-721
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Almeida JB

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference12 articles.

1. Cold Cathode Glow Discharge Tubes;Weston,1968

2. Handbook of Thin Film Technology,1970

3. Handbook of Thin Film Technology;Wehner,1970

4. Magnetron sputtering: basic physics and application to cylindrical magnetrons

5. Diagnostic methods for sputtering plasmas

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3. Improving Performance of CIGS Solar Cells by Annealing ITO Thin Films Electrodes;International Journal of Photoenergy;2015

4. Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature;Vacuum;2008-08

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