Uncertainties in calibration using capacitance diaphragm gauges as reference standard-Reference-Cited by-同舟云学术

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Uncertainties in calibration using capacitance diaphragm gauges as reference standard

Published:2008-08 Issue:12 Volume:82 Page:1503-1506
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Hidalgo J.M.,de Segovia J.L.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference10 articles.

1. Theory and Practice of Vacuum Technology;Wutz,1989

2. Calibration to High Precision in the Medium Vacuum Range with Stable Environments and Micromanometer

3. The operation of a capacitance manometer at 300 °C

4. Total Pressure Measurements in Vacuum Technology;Berman,1985

5. Vacuum gauge calibration by a combination of expansion and pumpdown methods

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Extending the Pressure Limit for Turbomolecular Pump up to 133 Pa by using Conductance-Reducer and Measuring the Pressure Differences in Vacuum Chamber;Journal of the Korean Vacuum Society;2010-01-30

2. A Study of Non-uniform Pressure Distribution in Vacuum Chamber during Dynamic Gas Flow;Journal of the Korean Vacuum Society;2009-11-30

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