Extending the Pressure Limit for Turbomolecular Pump up to 133 Pa by using Conductance-Reducer and Measuring the Pressure Differences in Vacuum Chamber-Reference-Cited by-同舟云学术

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Extending the Pressure Limit for Turbomolecular Pump up to 133 Pa by using Conductance-Reducer and Measuring the Pressure Differences in Vacuum Chamber

Published:2010-01-30 Issue:1 Volume:19 Page:1-9
ISSN:1225-8822
Container-title:Journal of the Korean Vacuum Society
language:en
Short-container-title:Journal of the Korean Vacuum Society

Author:

Hong S.S.,Khan Wakil,Kang S.W.,Yun J.Y.,Shin Y.H.

Publisher

The Korean Vacuum Society

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)

Link

http://ocean.kisti.re.kr/downfile/crosscheck/kvs/JAKO201008939909510.pdf

Reference15 articles.

1. Characteristics of Electomigration & Surface Hardness about Tungsten-Carbon-Nitrogen(W-C-N) Related Diffusion Barrier

2. How to reduce the power consumption of vacuum pump in semiconductor industry

3. Measurement of pressure differences between various positions in a vacuum chamber where pressure is generated dynamically

4. Causes and Consequences of Nonuniform Gas Distributions in Vacuum Systems

5. Measurement of the pressure differences in a large chamber where the pressure is generated dynamically

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An Overview of Low Vacuum System for the Pressure Range from 1 Pa to 133 Pa;Journal of the Vacuum Society of Japan;2015

2. Analysis of pressure distribution for the various gas flow vacuum system in the range from 1Pa to 133Pa;Measurement;2013-02

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