Structural, electrical and optical properties of indium tin oxide thin films prepared by RF sputtering using different density ceramic targets
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference12 articles.
1. Effects of air annealing on the optical, electrical, and structural properties of indium-tin oxide thin films
2. Effect of oxygen partial pressure on the structural and optical properties of dc sputtered ITO thin films
3. Advanced indium-tin oxide ceramics for sputtering targets
4. Structural, electrical and optical analysis of ITO thin films prepared by sol–gel
5. Preparation and characterization of indium-doped tin oxide thin films
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3. Preparation of extraordinary high-density indium-tin oxide target on the basis of pressure-less sintering method;Ceramics International;2024-01
4. Achieving high relative density and low resistivity in indium tin oxide targets via Bi2O3-CeO2 additive;Journal of Alloys and Compounds;2023-12
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