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Influence of silicon crystal orientation on piezoelectric textured aluminium nitride deposited on metal electrodes

  • Published:2016-10 Issue: Volume:132 Page:47-52
  • ISSN:0042-207X
  • Container-title:Vacuum
  • language:en
  • Short-container-title:Vacuum

Author:

Jackson NathanORCID

Funder

Science Foundation Ireland-funded National Access Programme project

European Union Seventh Framework Programme

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference28 articles.

1. Epitaxial lateral overgrowth of AlN on self-assembled patterned nanorods;Conroy;J. Mater. Chem. C,2015

2. Vibration energy harvesting with aluminum nitride-based piezoelectric devices;Elfrink;J. Micromech Microeng.,2009

3. Evaluation of low-acceleration MEMS piezoelectric energy harvesting devices;Jackson;Microsyst. Technol.,2014

4. Single-chip multiple frequency AlN MEMS filters based on contour-mode piezoelectric resonators;Piazza;J. Microelectromech. S,2007

5. A MEMS silicon-based piezoelectric AC current sensor;Olszewski,2014

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