A gasket-type standard leak element using femtosecond laser micromachining
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference21 articles.
1. New leak element using sintered stainless steel filter for in-situ calibration of ionization gauges and quadrupole mass spectrometers
2. In-situ calibration method for ionization gauges and quadrupole mass spectrometers by combining the standard conductance element and the conductance modulation method (SCE–CM method)
3. The Transmission Factor Method: in-situ Characterization of Getter Coated Pipes
4. Nano-holes as standard leak elements
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2. Development of an EPU vacuum system using lumped NEG-ion combination pumps;Vacuum;2022-01
3. New leak elements for helium based on single-layer graphene composite membranes;Journal of Vacuum Science & Technology B;2021-07
4. A flange-type standard leak element and its vacuum applications;Vacuum;2021-02
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