Development of an EPU vacuum system using lumped NEG-ion combination pumps
Author:
Chan C.K.,Chang C.C.,Yang I.C.,Cheng C.M.,Chen B.Y.,Shueh C.,Cheng Y.T.,Guo Y.H.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference22 articles.
1. https://www.saesgetters.com/st707-strips.