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Bulk acoustic wave resonator based wireless and passive pressure sensor

  • Published:2020-08 Issue: Volume:178 Page:109433
  • ISSN:0042-207X
  • Container-title:Vacuum
  • language:en
  • Short-container-title:Vacuum

Author:

Xuan Weipeng,Chen Jin,Wu Ting,Chen JinkaiORCID,Huang Xiwei,Dong Shurong,Wang Xiaozhi,Jin Hao,Luo Jikui

Funder

National Key R&D Program of China

National Natural Science Foundation of China

Zhejiang Province Key R & D programs

Zhejiang Lab

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference35 articles.

1. A wireless implantable passive microdosimeter for radiation oncology;Son;IEEE (Inst. Electr. Electron. Eng.) Trans. Biomed. Eng.,2008

2. Wireless micromachined ceramic pressure sensor for high-temperature applications;Fonseca;J. Microelectromech. Syst.,2002

3. Error correction method for passive and wireless resonant SAW temperature sensor;Liu;IEEE Sensor. J.,2015

4. Wireless passive high-temperature sensor based on multifunctional reflective patch antenna up to 1050 degrees centigrade;Cheng;Sens. Actuators, A,2015

5. Passive downhole pressure sensor based on surface acoustic wave technology;Quintero;Sensors,2017

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