HFCVD diamond deposition parameters optimized by a Taguchi Matrix
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference17 articles.
1. High-quality diamond film deposition on a titanium substrate using the hot-filament chemical vapor deposition method
2. Optimization of a thermal-CVD system for carbon nanotube growth
3. In situ synthesis of Si3N4 in the Na2SiF6–N2 system via CVD: Kinetics and mechanism of solid-precursor decomposition
4. Machining behaviour of silicon nitride tools coated with micro-, submicro- and nanometric HFCVD diamond crystallite sizes
5. Polyacetylene in Diamond Films Evidenced by Surface Enhanced Raman Scattering
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