Effect of Zr content on mechanical properties of Ti–Ni–Zr shape memory alloy films prepared by dc magnetron sputtering-Reference-Cited by-同舟云学术

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Effect of Zr content on mechanical properties of Ti–Ni–Zr shape memory alloy films prepared by dc magnetron sputtering

Published:2008-10 Issue:3 Volume:83 Page:664-667
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Inoue Shozo,Sawada Naoki,Namazu Takahiro

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference10 articles.

1. Martensitic transformation and shape memory behavior in sputter-deposited TiNi-base thin films

2. Thin-film shape-memory alloy actuated micropumps

3. Skrobanek KD, Kohl M, Miyazaki S. Proceedings of IEEE 10th annual international workshop on micro electro mechanical systems; 1997. p. 256.

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