Deposition of TiAlN coatings using reactive bipolar-pulsed direct current unbalanced magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference33 articles.
1. State of the art for the industrial use of ceramic PVD coatings
2. A new class of high performance PVD coatings for carbide cutting tools
3. Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium
4. High rate reactively sputtered TiN coatings on high speed steel drills
5. The effect of the addition of Al and Si on the physical and mechanical properties of titanium nitride
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2. Effect of bias voltage on the erosion performance of TiAlSiN coatings on TC6 substrate by high power impulse magnetron sputtering;Surface and Coatings Technology;2024-02
3. Erosion Performance of TiAlSiN Coatings Prepared by High-Power Pulsed Magnetron Sputtering;Metals;2023-07-21
4. Effects of nitrogen flow rate on the microstructure and mechanical and tribological properties of TiAlN films prepared via reactive magnetron sputtering;Ceramics International;2023-06
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