Void formation in silica glass induced by thermal oxidation after Zn+ ion implantation
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference15 articles.
1. Monitoring interstitial fluxes by self-assembled nanovoids in ion-implanted Si/SiGe/Si strained structures
2. Synthesis of ZnO nanocrystals in sapphire by ion implantation and vacuum annealing
3. Ion implantation inducing nanovoids characterized by TEM and STEM
4. Fabrication of nickel oxide nanoparticles in SiO2 by metal-ion implantation combined with thermal oxidation
5. Formation processes of nickel oxide nanoparticles in SiO2 by metal-ion implantation combined with thermal oxidation
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1. Study of a Near-Surface Quartz Layer Sequentially Implanted with Zinc and Fluorine;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2021-07
2. Nanoparticle Formation in Si Implanted with Zinc and Oxygen Ions With Subsequent Annealing in Vacuum;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2021-05
3. Studying a Silica Film Implanted with Zn and Irradiated with Swift Xe Ions;Bulletin of the Russian Academy of Sciences: Physics;2019-11
4. Computer Analysis of AFM Images of a Silicon Surface Implanted with Zinc Ions and Oxidized at Elevated Temperatures;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2019-07
5. Computer analysis of the AFM images of the nanopore system on the SiO2/Si structure surface, obtained by Zn ion implantation;Bulletin of the Russian Academy of Sciences: Physics;2014-09
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