Improvement of a dual frequency sputtering device for higher deposition rates of protective zirconium oxide films on ceramics
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference8 articles.
1. Structural and optical properties of thin zirconium oxide films prepared by reactive direct current magnetron sputtering;Venkataraj;J Appl Phys,2002
2. The evolution of thermal barrier coatings in gas turbine engine applications;Meier;J Eng Gas Turbine Power,1994
3. Reactive magnetron sputtered zirconium oxide and zirconium silicon oxide thin films;Russak;J Vac Sci Technol,1989
4. Optical coatings for laser fusion applications;Lowdermilk;Thin Solid Films,1980
5. Preparation of zirconium oxide thin film using inductively coupled oxygen plasma sputtering;Ohtsu;Surf Coat Technol,2005
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of driving frequency on plasma property in radio frequency and very high frequency magnetron sputtering discharges;Plasma Sources Science and Technology;2013-12-16
2. Effect of Internal Antenna Coil Power on the Plasma Parameters in 13.56 MHz/60 MHz Dual-Frequency Sputtering;Plasma Science and Technology;2013-12
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