Effects of strong magnetic field on plasma immersion ion implantation of dielectric substrates
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference23 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. Handbook of plasma immersion ion implantation and deposition;Andres,2000
3. Principles of plasma discharge and materials processing;Liberman,2005
4. Numerical Simulation of Metal Plasma Immersion Ion Implantation and Deposition on a Dielectric Wedge
5. Applications of plasma immersion ion implantation in microelectronics — a brief review
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1. A hybrid model for simulation of secondary electron emission in plasma immersion ion implantation under different pulse rise time;Physics of Plasmas;2015-02
2. Effect of the q-nonextensive electron velocity distribution on a magnetized plasma sheath;Physics of Plasmas;2014-08
3. Formation of microcraters on plant cell wall by plasma immersion ion implantation;Surface and Coatings Technology;2013-08
4. Numerical analysis of monoenergetic electrons energy effect on dynamic potential profile of plasma sheath;Journal of Plasma Physics;2013-01-10
5. Ion Temperature Effect on Weakly Collisional DC Plasma Sheath;Journal of Fusion Energy;2010-04-03
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