Structure and mechanical properties of DC magnetron sputtered TiC/Cu films
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference22 articles.
1. Handbook of refractory carbides and nitrides;Pierson,1996
2. Handbook of ceramic hard materials;Riedel,2000
3. Effects of residual stress on the mechanical and structural properties of TiC thin films grown by RF sputtering
4. Deposition of TiC films by dual source dc magnetron sputtering
5. Electron field emission from Ti-containing tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc
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