Structural and mechanical properties of ZrN films prepared by ion beam sputtering with varying N2/Ar ratio and substrate temperature
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference15 articles.
1. Fatigue properties of a 316L stainless steel coated with different ZrN deposits
2. Nitrogen ion implantation on group IVb metals: chemical, mechanical and tribological study
3. Tribological behaviour of hard coatings deposited by arc-evaporation PVD
4. Effect of substrate bias on the structure and properties of ion-plated ZrN on Si and stainless steel substrates
5. Bias effect of ion-plated zirconium nitride film on Si(100)
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