Author:
Grzebyk Tomasz,Górecka-Drzazga Anna
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference13 articles.
1. A review of micropumps;Laser;Journal of Micromechanics and Microengineering,2004
2. A micromachined vapor jet pump;Doms;Sensors and Actuators A,2005
3. On-chip vacuum generated by a micromachined Knudsen pump;McNamara;Journal of Microelectromechanical Systems,2005
4. Glass orbitron of 5-cm diameter;Naik;Journal of Vacuum Science and Technology,1967
5. A miniaturized orbitron pump for MEMS applications;Koops,2005
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