Study of plasma characteristic and properties of flexible ultra-thin ITO films prepared by large area 3-D confined and planar magnetron sputtering-Reference-Cited by-同舟云学术

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Study of plasma characteristic and properties of flexible ultra-thin ITO films prepared by large area 3-D confined and planar magnetron sputtering

Published:2019-07 Issue: Volume:165 Page:246-253
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Sahu Bibhuti B.,Wen Long,Kim Seok H.,Han Jeon G.

Funder

National Research Foundation of Korea

Ministry of Science and ICT (MSIT)

ICT (MSIT)

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference34 articles.

1. Indium tin oxide films: state-of-the-art in synthesis and properties, mater;Kumar;Technol.,1995

2. Recent developments in the emerging field of crystallite p-type transparent conducting oxide thin films;Banerjee;Prog. Cryst. Growth Char.,2005

3. Flexible OLED fabrication with ITO thin film on polymer substrate;Kim;Jpn. J. Appl. Phys.,2015

4. Polymers for flexible displays: from material selection to device applications;Choi;Prog. Polym. Sci.,2008

5. Effects of deposition parameters on the electrical and mechanical properties of indium tin oxide films on polyethylene naphthalate substrates deposited by radio frequency magnetron sputtering;Bhagat;Thin Solid Films,2008

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Overall aspect for designing magnetron sputtering plasma sources and their applications in the deposition of ITO films;AIP Advances;2024-05-01

2. Fabrication of high aspect-ratio metallic nanotube array with highly-ordered periodicity using HiPIMS;Journal of Alloys and Compounds;2023-10

3. The measurement and impact of negative oxygen ions during reactive sputter deposition;Critical Reviews in Solid State and Materials Sciences;2023-09-21

4. Room temperature deposition of very thin and flexible crystalline ITO thin film using 3-D facing-magnetron sputtering plasma source;Vacuum;2021-11

5. Optoelectronic properties of an AZO/Ag multilayer employed as a flexible electrode;Ceramics International;2021-02

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