Numerical investigation of three turbomolecular pump models in the free molecular flow range
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference27 articles.
1. Kruger CH. Ph.D. thesis. Department of Mechanical Engineering, MIT: Cambridge, MA; 1960.
2. Theoretical studies of the modern turbomolecular pump
3. Performance of a Turbomolecular Pump in the Transition and Slip Flow Regimes
4. General geometry calculations of one‐stage molecular flow transmission probabilities for turbomolecular pumps
5. The statistical theory of turbomolecular pumps
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