The statistical theory of turbomolecular pumps
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Published:1982-04
Issue:4
Volume:20
Page:1101-1104
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Chu J. G.,Hua Z. Y.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
25 articles.
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