Active species characterization in RF remote oxygen plasma using actinometry OES and electrical probes
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference33 articles.
1. Effects of dc bias on the kinetics and electrical properties of silicon dioxide grown in an electron cyclotron resonance plasma
2. Pulsed microwave plasma etching of polymers in oxygen and nitrogen for microelectronic applications
3. Deposition rate and three-dimensional uniformity of RF plasma deposited SiOx films
4. Effects of aromatic groups in polymer chains on plasma surface modification
5. Rapid surface modification of polyethylene in microwave and r.f.-plasmas: comparative study
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