Effect of doping and substrate temperature on the structural and optical properties of reactive pulsed laser ablated tin oxide doped tantalum oxide thin films-Reference-Cited by-同舟云学术

Effect of doping and substrate temperature on the structural and optical properties of reactive pulsed laser ablated tin oxide doped tantalum oxide thin films

Published:2010-05 Issue:10 Volume:84 Page:1204-1211
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Krishnan Renju R.,Nissamudeen K.M.,Gopchandran K.G.,Pillai V.P. Mahadevan,Ganesan V.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference29 articles.

1. Thin film technology;Berry,1968

2. Tantalum thin films;Westwood,1975

3. Effects of deposition parameters on optical loss for rf-sputtered Ta2O5 and Si3N4 waveguides;Paulson;J Vac Sci Technology,1979

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modulation of electrical properties of sputtered Ta₂O₅ films by variation of RF power and substrate temperature;Physica Scripta;2024-01-12

2. Annealing effects on the optical and electrochemical properties of tantalum pentoxide films;Journal of Advanced Ceramics;2021-03-21

3. Effect of hydrogen peroxide on photoelectric properties of high-transmittance FTO films prepared by spray pyrolysis;Surface and Coatings Technology;2019-03

4. Amorphization of Ta2O5 under swift heavy ion irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-09

5. CAPNet: An Enhanced Load Balancing Clustering Algorithm for Prolonging Network Lifetime in WSNs;International Journal of Distributed Sensor Networks;2014-02-01