Low-temperature deposition of nanocrystalline Al2O3 films by ion source-assisted magnetron sputtering-Reference-Cited by-同舟云学术

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Low-temperature deposition of nanocrystalline Al2O3 films by ion source-assisted magnetron sputtering

Published:2018-03 Issue: Volume:149 Page:284-290
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Ding Ji Cheng,Zhang Teng Fei,Mane Rajaram S.,Kim Kwang-Ho,Kang Myung Chang,Zou Chang Wei,Wang Qi Min

Funder

NSFC project

Guangdong Natural Science Fund

National Research Foundation of Korea (NRF)

Ministry of Science, ICT & Future Planning

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference41 articles.

1. Comparison in formation, optical properties and applicability of DC magnetron and RF sputtered aluminum oxide films

2. Structural analysis of highly porous γ-Al2O3

3. γ‐Alumina as a Support for Catalysts: A Review of Fundamental Aspects

4. The effect of tool wear on tool life of alumina-based ceramic cutting tools while machining hardened martensitic stainless steel

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1. Simulation Study of Crystalline Al2O3 Thin Films Prepared at Low Temperatures: Effect of Deposition Temperature and Biasing Voltage;Metals;2024-07-29

2. Dense Al2o3 Films Prepared by High Power Impulse Magnetron Sputtering at Pulsed Kv Bias;2024

3. Effect of V/Mo Atomic Ratio on the Microstructure and Mechanical Properties of MoVCuN Coatings;Materials;2023-12-31

4. Microstructure and Mechanical Properties of AlTiVCuN Coatings Prepared by Ion Source-Assisted Magnetron Sputtering;Nanomaterials;2023-12-15

5. Effect of AcAc/Al molar ratio on morphological and electrical properties of spray-coated Al2O3 thin films;Journal of the Korean Physical Society;2022-09-20

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